Ultrathin fluorinated diamondlike carbon coating for nanoimprint lithography imprinters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2869-2872

  Fillman, Ryan W ^a   Krchnavek, Robert R ^a  

^a Rowan University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-WEAR; DIAMOND-LIKE CARBON; FLUORINATED DIAMOND-LIKE CARBON; IMPRINTED POLYMERS; NANOSCALE FEATURES; STEP-AND-REPEAT; ULTRA-THIN; ULTRATHIN LAYERS; UV LITHOGRAPHY;

SILICON COMPOUNDS;

NANOIMPRINT LITHOGRAPHY;

EID: 72849133354     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3250258     Document Type: Conference Paper

References (12)

1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
2. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Science 272, 85 (1996).
3. J. Haisma, M. Verheijen, and J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996).
4. X. Sun, L. Zhuang, W. Zhang, and S. Y. Chou, J. Vac. Sci. Technol. B 16, 3922 (1998).
5. M. Beck, M. Graczyk, I. Maximov, E.-L. Sarwe, T. G. I. Ling, M. Keil, and L. Montelius, Microelectron. Eng. 61-62, 441 (2002).
6. J.-K. Chen, F.-H. Ko, K.-F. Hsieh, C.-T. Chou, and F.-C. Chang, J. Vac. Sci. Technol. B 22, 3233 (2004).
7. A. Grill, Diamond Relat. Mater. 8, 428 (1999).
8. M. Grischke, K. Bewilogua, K. Trojan, and H. Dimigen, Surf. Coat. Technol. 74-75, 739 (1995).
9. R. Memming, Thin Solid Films 143, 279 (1986).
10. S. Ramachandran et al., J. Vac. Sci. Technol. B 24, 2993 (2006).
11. M. Schvartzman, A. Mathur, Y. Kang, C. Jahnes, J. Hone, and S. J. Wind, J. Vac. Sci. Technol. B 26, 2394 (2008).
12. R. S. Butter, D. R. Waterman, A. H. Lettington, R. T. Ramos, and E. J. Fordham, Thin Solid Films 311, 107 (1997).