Electron beam projection nanopatterning using crystal lattice images obtained from high resolution transmission electron microscopy

Advanced Materials

Volumn 19, Issue 23, 2007, Pages 4189-4193

  Lee, Hyo Sung ^a   Kim, Byung Sung ^a,c   Kim, Hyun Mi ^a   Wi, Jung Sub ^a   Nam, Sung Wook ^a   Jin, Kyung Bae ^a   Arai, Yoshihiro ^b   Kim, Ki Bum ^a  

^a Seoul National University   (South Korea)

^b JEOL LTD   (Japan)

^c SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTALLINE MATERIALS; ELECTRON BEAMS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; THROUGHPUT;

CRYSTALLINE LATTICE IMAGES; CRYSTALLINE SILICON; ELECTRON BEAM PROJECTION; PATTERNED STRUCTURES;

NANOCRYSTALS;

EID: 37149055052     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200701119     Document Type: Article

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