SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3497-3502

Nonaqueous development of silsesquioxane electron beam resist

(3) Schmid, Gerard M a Carpenter II, Leslie E b Liddle, J Alexander a

a LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

b DOW CHEMICAL COMPANY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS BASE PROCESSING; HIGH-RESOLUTION PATTERNS; HYDROGEN SILSESQUIOXANE (HSQ); MECHANICAL STABILITY;

ATOMIC FORCE MICROSCOPY; CONDENSATION; CROSSLINKING; DISSOLUTION; ELECTRON BEAMS; MICROELECTRONICS; OPTICAL RESOLVING POWER; ORGANIC SOLVENTS; SCANNING ELECTRON MICROSCOPY; SOLUTIONS; THERMODYNAMICS;

DIELECTRIC MATERIALS;

EID: 13244259602 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1825014 Document Type: Conference Paper

Times cited : (28)

References (10)

1
- 0002053947
- H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, and K. Kurihara, J. Vac. Sci. Technol. B 16, 69 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 69
- Namatsu, H.¹ Takahashi, Y.² Yamazaki, K.³ Yamaguchi, T.⁴ Nagase, M.⁵ Kurihara, K.⁶

2
- 0034318652
- F. C. M. J. M. van Delft, J. P. Weterings, A. K. van Langen-Suurling, and H. Romijn, J. Vac. Sci. Technol. B 18, 3419 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3419
- Van Delft, F.C.M.J.M.¹ Weterings, J.P.² Van Langen-Suurling, A.K.³ Romijn, H.⁴

3
- 0942267518
- J. A. Liddle, F. Salmassi, P. Naulleau, and E. Gullikson, J. Vac. Sci. Technol. B 21, 2980 (2003).
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2980
- Liddle, J.A.¹ Salmassi, F.² Naulleau, P.³ Gullikson, E.⁴

4
- 0036883178
- D. P. Mancini, K. A. Gehoski, E. Ainley, K. J. Nordquist, D. J. Resnick, T. C. Bailey, S. V. Sreenivasan, J. Ekerdt, and C. G. Willson, J. Vac. Sci. Technol. B 20, 2896 (2002).
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 2896
- Mancini, D.P.¹ Gehoski, K.A.² Ainley, E.³ Nordquist, K.J.⁴ Resnick, D.J.⁵ Bailey, T.C.⁶ Sreenivasan, S.V.⁷ Ekerdt, J.⁸ Willson, C.G.⁹

5
- 0031209139
- P. C. Tsiartas, L. W. Flanagin, C. L. Henderson, W. D. Hinsberg, I. C. Sanchez, R. T. Bonnecaze, and C. G. Willson, Macromolecules 30, 4656 (1997).
- (1997) Macromolecules , vol.30 , pp. 4656
- Tsiartas, P.C.¹ Flanagin, L.W.² Henderson, C.L.³ Hinsberg, W.D.⁴ Sanchez, I.C.⁵ Bonnecaze, R.T.⁶ Willson, C.G.⁷

6
- 0012697232
- L. W. Flanagin, C. L. McAdams, W. D. Hinsberg, I. C. Sanchez, and C. G. Willson, Abstr. Pap. - Am. Chem. Soc. 218, 112 (1998); G. M. Schmid, S. D. Burns, P. C. Tsiartas, and C. G. Willson, J. Vac. Sci. Technol. B 20, 2913 (2002).
- (1998) Abstr. Pap. - Am. Chem. Soc. , vol.218 , pp. 112
- Flanagin, L.W.¹ McAdams, C.L.² Hinsberg, W.D.³ Sanchez, I.C.⁴ Willson, C.G.⁵

7
- 0036883222
- L. W. Flanagin, C. L. McAdams, W. D. Hinsberg, I. C. Sanchez, and C. G. Willson, Abstr. Pap. - Am. Chem. Soc. 218, 112 (1998); G. M. Schmid, S. D. Burns, P. C. Tsiartas, and C. G. Willson, J. Vac. Sci. Technol. B 20, 2913 (2002).
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 2913
- Schmid, G.M.¹ Burns, S.D.² Tsiartas, P.C.³ Willson, C.G.⁴

8
- 0242425719
- W. Henschel, Y. M. Georgiev, and H. Kurz, J. Vac. Sci. Technol. B 21, 2018 (2003).
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2018
- Henschel, W.¹ Georgiev, Y.M.² Kurz, H.³

9
- 13244272661
- F. J. Feher, Gelest Catalog: Si, Ge, Sn, 32-45 (1998).
- (1998) Gelest Catalog: Si, Ge, Sn , pp. 32-45
- Feher, F.J.¹

10
- 0032058086
- M. J. Loboda and G. A. Toskey, Solid State Technol. 41, 99 (1998).
- (1998) Solid State Technol. , vol.41 , pp. 99
- Loboda, M.J.¹ Toskey, G.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.