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Volumn , Issue , 2009, Pages 241-244
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Bulk-Si FinFET technology for ultra-high aspect-ratio devices
b
FER ZEMRIS
*
(Croatia)
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVE PARTS;
ANALOG APPLICATIONS;
BULK SILICON;
CURRENT CONDUCTION;
FIN WIDTHS;
FINFETS;
HIGH FREQUENCY HF;
N-CHANNEL;
SILICON AREA;
SURFACE ORIENTATION;
ULTRA-HIGH;
ASPECT RATIO;
ELECTRON MOBILITY;
FINS (HEAT EXCHANGE);
FORCED CONVECTION;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
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EID: 72849121250
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ESSDERC.2009.5331554 Document Type: Conference Paper |
Times cited : (3)
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References (8)
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