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Volumn 256, Issue 6, 2010, Pages 1774-1777
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Low temperature deposition of transparent conducting ITO/Au/ITO films by reactive magnetron sputtering
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Author keywords
Gold; Indium tin oxide; Optical transmittance; Resistivity; Sputtering
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Indexed keywords
CONDUCTIVE FILMS;
ELECTRIC CONDUCTIVITY;
FILM THICKNESS;
GOLD;
GOLD COMPOUNDS;
INDIUM COMPOUNDS;
MAGNETRON SPUTTERING;
OPACITY;
SPUTTERING;
SURFACE ROUGHNESS;
TEMPERATURE;
THIN FILMS;
TIN OXIDES;
X RAY DIFFRACTION;
INDIUM TIN OXIDE;
LOW-TEMPERATURE DEPOSITION;
MULTI-LAYERED FILMS;
OPTOELECTRICAL PROPERTIES;
POLYCARBONATE SUBSTRATES;
REACTIVE MAGNETRON SPUTTERING;
VISIBLE-WAVELENGTH RANGE;
X-RAY DIFFRACTION MEASUREMENTS;
OXIDE FILMS;
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EID: 72749125397
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2009.10.002 Document Type: Article |
Times cited : (74)
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References (18)
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