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Volumn 256, Issue 6, 2010, Pages 1774-1777

Low temperature deposition of transparent conducting ITO/Au/ITO films by reactive magnetron sputtering

Author keywords

Gold; Indium tin oxide; Optical transmittance; Resistivity; Sputtering

Indexed keywords

CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY; FILM THICKNESS; GOLD; GOLD COMPOUNDS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OPACITY; SPUTTERING; SURFACE ROUGHNESS; TEMPERATURE; THIN FILMS; TIN OXIDES; X RAY DIFFRACTION;

EID: 72749125397     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.10.002     Document Type: Article
Times cited : (74)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.