RF sputtering deposition of Ag/ITO coatings at room temperature

Solid State Ionics

Volumn 165, Issue 1-4, 2003, Pages 139-148

  Bertran, E ^a   Corbella, C ^a   Vives, M ^a   Pinyol, A ^a   Person, C ^a   Porqueras, I ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Ag; E Beam; Electrochromism; ITO; Polymeric substrate Indium tin oxide; PVD; RF magnetron sputtering; TCO; Thin films

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; ELECTROCHROMISM; INDIUM COMPOUNDS; LIGHT TRANSMISSION; SPUTTER DEPOSITION; SUBSTRATES;

COEVAPORATION;

THIN FILMS;

EID: 0344118146     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssi.2003.08.055     Document Type: Conference Paper

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