Image-based hysteresis modeling and compensation for an AFM piezo-scanner

Asian Journal of Control

Volumn 11, Issue 2, 2009, Pages 166-174

  Zhang, Yudong ^a   Fang, Yongchun ^a   Zhou, Xianwei ^a   Dong, Xiaokun ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

Atomic Force Microscope (AFM); Compensation; Hysteresis; Image; Modeling

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPENSATION (PERSONNEL); HYSTERESIS; MODELS; NANOSENSORS;

CLASSICAL PREISACH MODEL; HYSTERESIS BEHAVIOR; HYSTERESIS MODELING; IDENTIFICATION DATA; IMAGE; NANOSCALE POSITION SENSORS; NONLINEAR CHARACTERISTICS; POSITIONING ACCURACY;

SCANNING;

EID: 72649088240     PISSN: 15618625     EISSN: None     Source Type: Journal    
DOI: 10.1002/asjc.92     Document Type: Article

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