Oblique-angle sputtering effects on characteristics of nanocolumnar structure anisotropic indium tin oxide films

Journal of the Electrochemical Society

Volumn 156, Issue 6, 2009, Pages

  Chen, Lung Chien ^a   Chen, Cheng Chiang ^a   Sung, Yen Tang ^a   Hsu, Ya Ying ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION EDGES; ARRIVAL ANGLES; BAND GAPS; BLUE SHIFTS; BURSTEIN-MOSS EFFECTS; DIFFRACTION PEAKS; INDIUM TIN OXIDE FILMS; ITO FILMS; OBLIQUE ANGLES; OBLIQUE-ANGLE SPUTTERING; OXYGEN CONTENTS; QUANTUM CONFINEMENT EFFECTS; RADIO-FREQUENCY MAGNETRON SPUTTERING SYSTEMS;

ANISOTROPY; MAGNETRON SPUTTERING; OXIDE FILMS; OXYGEN; OZONE WATER TREATMENT; PHOTODEGRADATION; PHOTOLITHOGRAPHY; TIN; TITANIUM COMPOUNDS;

INDIUM;

EID: 65449149720     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3116248     Document Type: Article

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