The properties of antimony-doped tin oxide thin films from the sol-gel process

Surface and Coatings Technology

Volumn 88, Issue 1-3, 1997, Pages 239-247

  Lin, Yung Jen ^a   Wu, Ching Jiunn ^a  

^a TATUNG INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Antimony; Resistance; Spin coating; Spray coating; Thin films; Tin oxide

Indexed keywords

ANTIMONY COMPOUNDS; CONDUCTIVE FILMS; ELECTRIC RESISTANCE; SOL-GELS; SPRAYING; TIN COMPOUNDS;

ANTIMONY DOPED FILMS; SHEET RESISTANCE; SPIN COATING; TIN OXIDE FILMS;

THIN FILMS;

EID: 0030784361     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02926-X     Document Type: Article

References (26)

1. 2-based thin film sensors prepared by the sol-gel process, Mater. Lett., 17 (1993) 346-352.
2. A. Wilson, J.D. Wright and J.J. Murphy, Sol-gel materials for gas-sensing applications, Sensors Actuators B, 18-19 (1994) 506-510.
3. 2 gas sensors, Jpn. J. Appl. Phys., 19 (3) (1980) 513-517.
4. 2 powders, Sensors Actuators B, 18-19 (1994) 474-477.
5. M. Honoré, S. Lenaerts, J. Desmet, G. Huyberechts and J. Roggen, Synthesis and characterization of tin dioxide powders for the realization of thick-film gas sensors, Sensors Actuators B, 18-19 (1994) 621-624.
6. 2 thin films for gas sensors, Sensors Actuators B, 18-19 (1994) 637-641.
7. 2 film gas sensors, J. Ceram. Soc. Japan, 103 (1995) 113-116.
8. 2 thin film gas sensors, J. Ceram. Soc. Japan, 103 (1995) 59-63.
9. A.J. Moulson and J.M. Herbert, Electroceramics, Chapman and Hall, New York, 1990, Chapter 4.
10. 4 precursors, Thin Solid Films, 252 (1994) 61-66.
11. I.S. Mulla, H.S. Soni, V.J. Rao and A.P.B. Sinha, Deposition of improved optically selective conductive tin oxide films by spray pyrolysis, J. Mater. Sci., 21 (1986) 1280-1288.
12. 2 powders by ultrasonic spray pyrolysis, J. Am. Ceram. Soc., 76 (3) (1993) 777-780.
13. G. Sanon, Rajrup and A. Mansingh, Growth and characterization of tin oxide films prepared by chemical vapour deposition, Thin Solid Films, 190 (1990) 287-301.
14. K.H. Kim and S.W. Lee, Effect of antimony addition on electrical and optical properties of tin oxide film, J. Am. Ceram. Soc., 77 (4) (1994) 915-921.
15. 2 particles by d.c. magnetron sputtering, Surf. Coat. Technol., 49 (1991) 304-310.
16. H. Viirola and L. Niinistö, Controlled growth of antimony-doped tin dioxide thin films by atomic layer epitaxy, Thin Solid Films, 251 (1994) 127-135.
17. B.-S. Chiou, S.-T. Hsieh and W.-F. Wu, Deposition of indium tin oxide films on acrylic substrates by radiofrequency magnetron sputtering, J. Am. Ceram. Soc., 77 (7) (1994) 1740-1744.
18. R.P. Howson, H. Barankova and A.G. Spence, Reactive sputtering of electrically conductive tin oxide, Thin Solid Films, 196 (1991) 315-321.
19. A. Maddalena, R. Dal Maschio, S. Dtre and A. Raccanelli, Electrical conductive of tin oxide films prepared by the sol-gel method, J. Non-Cryst. Solids, 121 (1990) 365-369.
20. 2 thin films obtained by the sol-gel technique, Thin Solids Film, 247 (1994) 162-168.
21. 2 films by ethanolamine-alkoxide method, J. Eletrochem. Soc., 137 (1) (1990) 267-271.
22. G. Gowda and D. Nguyen, Transparent IR-reflecting coatings prepared by the sol-gel process, Thin Solid films, 136 (1986) L39-42.
23. T. Tsuchiya, T. Emoto and T. Sei, Preparation and properties of transparent conductive thin films by sol-gel process, J. Non-Crystall. Solids, 178 (1994) 327-332.
24. T. Furusaki, J. Takahashi and K. Kodaira, Preparation of ITO thin films by sol-gel method, J. Ceram. Soc. Japan, 102 (2) (1994) 200-205.
25. 2 thin films by sol-gel method, J. Ceram. Soc. Japan, Int. Edn., 101 (1993) 441-445.
26. 2 gels from dispersed sols in aqueous colloidal solutions, J. Non-Crystall. Solids, 121 (1990) 76-83.