Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 2716-2721

  Merry, Roel ^a   Uyanik, Mustafa ^a   Koops, Richard ^b   Van De Molengraft, René ^a   Van Veghel, Marijn ^b   Steinbuch, Maarten ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NMi Van Swinden Laboratorium   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; EXTREME ULTRAVIOLET LITHOGRAPHY; IMAGE RECONSTRUCTION; IMAGING TECHNIQUES; MIM DEVICES; SCANNING; SENSORS; STAGES; STANDARDS; TRACKING (POSITION);

ATOMIC FORCE MICROSCOPES; CONTROL METHODS; FEED FORWARD; FEEDBACK CONTROLLERS; FREQUENCY RANGING; IMAGE CORRECTION; LOOP-SHAPING; METROLOGICAL ATOMIC FORCE MICROSCOPES; NANO-METER SCALE; NON-PARAMETRIC; POSTERIORI; REAL-TIME IMAGING; SCANNING SPEED; TRACKING PERFORMANCES; TRANSFER STANDARDS;

IDENTIFICATION (CONTROL SYSTEMS);

EID: 52449088933     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586903     Document Type: Conference Paper

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