Angular accuracy and the comparison of two methods for determining the surface normal in a Kratos Axis Ultra X-ray photoelectron spectrometer

Surface and Interface Analysis

Volumn 41, Issue 12-13, 2009, Pages 960-965

  Seah, M P ^a   Spencer, S J ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Angular accuracy; Geometry; Quantification; Surface normal; XPS

Indexed keywords

ANGULAR ACCURACY; CRYSTAL AXIS; ELECTRON TRANSPORT; EMISSION ANGLE; HOMOGENISATION; INSTRUMENT DESIGNS; INTERNAL COOLING; MAXIMUM ERROR; OPTICAL AXIS; ROTARY DRIVE; SAMPLE HOLDERS; SURFACE NORMALS; TILT ANGLE; X-RAY PHOTOELECTRON SPECTROMETERS; XPS; ZERO ANGLE;

ASSOCIATIVE STORAGE; CALIBRATION; CAMS; CRYSTAL ORIENTATION; ELECTRONS; LIGHT MEASUREMENT; PHOTOIONIZATION; PHOTONS; SPECTROMETERS; SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

INTEGRATED OPTOELECTRONICS;

EID: 72149130953     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3127     Document Type: Article

References (19)

1. M. P. Seah, S. J. Spencer, F. Bensebaa, I. Vickridge, H. Danzebrink, M. Krumrey, T. Gross, W. Oesterle, E. Wendler, B. Rheinländer, Y. Azuma, I. Kojima, N. Suzuki, M. Suzuki, S. Tanuma, D. W. Moon, H. J. Lee, Hyun Mo Cho, H. Y. Chen, A. T. S. Wee, T. Osipowicz, J. S. Pan, W. A. Jordaan, R. Hauert, U. Klotz, C. van der Marel, M. Verheijen, Y. Tamminga, C. Jeynes, P. Bailey, S. Biswas, U. Falke, N. V. Nguyen, D. Chandler-Horowitz, J. R. Ehrstein, D. Muller, J. A. Dura, Surf. Interface Anal. 2004, 36, 1269.
2. M. P. Seah, S. J. Spencer, Surf. Interface Anal. 2002, 33, 640.
3. M. P. Seah, W. E. S. Unger, Hai. Wang, W. Jordaan, Th. Gross, J. A. Dura, D. Won Moon, P. Totarong, M. Krumrey, R. Hauert, Mo. Zhiqiang, Surf. Interface Anal. 2009, 41, 430.
4. M. P. Seah, Surf. Interface Anal. 2005, 37, 300.
5. M. P. Seah, S. J. Spencer, Surf. Interface Anal. 2005, 37, 731.
6. M. P. Seah, Metrologia 2007, 44, 242.
7. W. F. Egelhoff, Crit. Rev. Solid StateMater. Sci. 1990, 16, 213.
8. S. A. Chambers, Surf. Sci. Repts. 1992, 16, 261.
9. K.Hirose,H.Nohira, K. Azuma, T. Hattori, Prog. Surf. Sci. 2007, 82, 3.
10. K. J. Kim, J. S. Jang, D. W. Moon, Metrologia 2006, 43, L28.
11. C. J. Powell, A. Jablonski, NIST Electron Effective-Attenuation-Length Database, SRD 82, Version 1.1. National Institute of Standards and Technology: Gaithersburg, 2003, http://www.nist.gov/srd/nist82.htm.
12. S. Tanuma, C. J. Powell,D. R. Penn, Surf. Interface Anal. 1991, 17, 927.
13. R. F. Reilman, A. Msezane, S. T. Manson, J. Electron Spectrosc. 1976, 8, 389.
14. C. J. Powell, W. S. M. Werner, W. Smekal, Appl. Phys. Lett. 2006, 89, 252116.
15. W. Werner, W. Smekal, C. J. Powell, NIST Database for the Simulation of Electron Spectra for Surface Analysis, SRD 100, Version 1.0. National Institute of Standards and Technology: Gaithersburg, 2005, http://www.nist.gov/srd/ nist100.htm.
16. K. J. Kim, M. P. Seah, Surf. Interface Anal. 2007, 39, 512.
17. N. Pauly, S. Tougaard, F. Yubero, Surf. Interface Anal. 2006, 38, 672.
18. ISO 17025 General requirements for the competence of testing and calibration laboratories, 2000, ISO, Geneva.
19. ISO 15472 Surface Chemical Analysis - X-ray Photoelectron Spectrometers - Calibration of Energy Scales, ISO: Geneva, 2001.