In-TFT-array-process micro defect inspection using nonlinear principal component analysis

International Journal of Molecular Sciences

Volumn 10, Issue 10, 2009, Pages 4498-4514

  Liu, Yi Hung ^a   Wang, Chi Kai ^a   Ting, Yung ^a   Lin, Wei Zhi ^a   Kang, Zhi Hao ^a   Chen, Ching Shun ^b   Hwang, Jih Shang ^c  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

Automatic optical inspection; Defect inspection; Kernel principal component analysis; Support vector machine; TFT array process; Thin film transistor liquid crystal display

Indexed keywords

ARTICLE; IMAGE ANALYSIS; IMAGE PROCESSING; IMAGE QUALITY; LIQUID CRYSTAL; MATHEMATICAL COMPUTING; PRINCIPAL COMPONENT ANALYSIS; QUALITY CONTROL; SUPPORT VECTOR MACHINE;

AUTOMATIC OPTICAL INSPECTION; DEFECT INSPECTION; KERNEL PRINCIPAL COMPONENT ANALYSIS; SUPPORT VECTOR MACHINE; TFT ARRAY PROCESS; THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY;

ALGORITHMS; LIQUID CRYSTALS; PRINCIPAL COMPONENT ANALYSIS; TRANSISTORS, ELECTRONIC;

EID: 71649113240     PISSN: None     EISSN: 14220067     Source Type: Journal    
DOI: 10.3390/ijms10104498     Document Type: Article

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