Automatic target defect identification for TFT-LCD array process inspection using kernel FCM-based fuzzy SVDD ensemble

Expert Systems with Applications

Volumn 36, Issue 2 PART 1, 2009, Pages 1978-1998

  Liu, Yi Hung ^a   Lin, Szu Hsien ^a   Hsueh, Yi Ling ^a   Lee, Ming Jiu ^b  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b CHUNGHWA PICTURE TUBES LTD   (Taiwan)

Author keywords

Fuzzy c means (FCM); Inline defect inspection; Support vector data description (SVDD); Support vector machine (SVM); Target defect identification; TFT LCD

Indexed keywords

CLASSIFIERS; DATA DESCRIPTION; DECISION MAKING; DEFECTS; FUZZY SYSTEMS; IMAGE ENHANCEMENT; INSPECTION; LIQUID CRYSTAL DISPLAYS; PIXELS; SUPPORT VECTOR MACHINES; VECTORS;

FUZZY C MEAN; INLINE DEFECT INSPECTION; SUPPORT VECTOR DATA DESCRIPTION; TARGET DEFECT IDENTIFICATION; TFT-LCDS;

THIN FILM TRANSISTORS;

EID: 56349104733     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2007.12.015     Document Type: Article

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