Acceleration of groove formation in silicon using catalytic wire electrodes for development of a slicing technique

Journal of Materials Processing Technology

Volumn 210, Issue 2, 2010, Pages 330-334

  Salem, Mohamed Shaker ^a   Lee, Chia Lung ^a   Ikeda, Shigeru ^a   Matsumura, Michio ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Electrochemical etching; Pulsed anodization; Silicon; Slicing

Indexed keywords

AG/AGCL; ANODIC POTENTIALS; ANODIZATIONS; CONCENTRATION OF; ELECTROCHEMICAL TECHNIQUES; GROOVE FORMATION; HYDROGEN FLUORIDE; PLATINUM WIRE; PLATINUM WIRE ELECTRODES; PULSED ANODIZATION; ROOM TEMPERATURE; WIRE ELECTRODE;

DISSOLUTION; ELECTROCHEMICAL ETCHING; ELECTROLYTES; GLYCEROL; INDUSTRIAL CHEMICALS; IODINE; PLATINUM; WIRE;

HYDROFLUORIC ACID;

EID: 71649097750     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2009.09.019     Document Type: Article

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