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Volumn 156, Issue 2, 2009, Pages

Electrochemical grooving of si wafers using catalytic wire electrodes in HF solution

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; HYDROFLUORIC ACID; PLATE METAL; PLATINUM; PLATINUM METALS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; WIRE;

EID: 58049133275     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3033735     Document Type: Article
Times cited : (16)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.