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Volumn 156, Issue 2, 2009, Pages
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Electrochemical grooving of si wafers using catalytic wire electrodes in HF solution
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRODES;
HYDROFLUORIC ACID;
PLATE METAL;
PLATINUM;
PLATINUM METALS;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON;
SILICON WAFERS;
WIRE;
AG-AGCL;
ANODIC POTENTIALS;
CHEMICAL SPECIES;
COUNTER ELECTRODES;
HF SOLUTIONS;
METAL WIRES;
ROOM TEMPERATURES;
SI SURFACES;
SI WAFERS;
WIRE ELECTRODES;
ELECTROCHEMICAL ELECTRODES;
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EID: 58049133275
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.3033735 Document Type: Article |
Times cited : (16)
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References (11)
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