A planar cascading architecture for a ceramic knudsen micropump

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2298-2301

  Gupta, Naveen K ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Gas flow; Knudsen pump; Liquid flow; Nanoporous ceramic; Thermal transpiration

Indexed keywords

GAS FLOWS; KNUDSEN PUMP; LIQUID FLOW; NANOPOROUS CERAMICS; THERMAL TRANSPIRATION;

ACTUATORS; AERODYNAMICS; CERAMIC MATERIALS; ETHYLENE; FLOW OF GASES; LIQUIDS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PROPYLENE; TRANSPIRATION; VACUUM PUMPS;

SOLID-STATE SENSORS;

EID: 71449120009     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285895     Document Type: Conference Paper

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