Initial results from the first MEMS fabricated thermal transpiration-driven vacuum pump

AIP Conference Proceedings

Volumn 585, Issue , 2001, Pages 502-509

  Vargo, Stephen E ^a   Muntz, E P ^a  

^a University of Southern California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROGELS; COMPRESSORS; ELECTROMECHANICAL DEVICES; FABRICATION; GASES; MEMS; NASA; POROUS MATERIALS; REACTIVE ION ETCHING; SPACE FLIGHT; TRANSPIRATION; VACUUM PUMPS;

COMMERCIAL INSTRUMENTS; DEEP REACTIVE ION ETCHING; INTEGRATION REQUIREMENTS; MAINTAINING TEMPERATURES; MEMS FABRICATION TECHNIQUES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NUMERICAL PREDICTIONS; RAREFIED GAS DYNAMICS;

GAS DYNAMICS;

EID: 56249144885     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1407602     Document Type: Conference Paper

References (5)

1. Vargo, S. E., Muntz, E. P., Shiilett, G. R., and Tang, W. C., J. Vacuum Science and Technology A 17, 2308-2313 (1999).
2. Vargo, S. E., and Muntz, E. P., "A Simple Micromechanical Compressor and Vacuum Pump for Flow Control and Other Distributed Applications, " American Institute of Aeronautics and Astronautics, 34th Aerospace Sciences Conf., AIAA-96-0310, Reno, NV, 1996.
3. Vargo, S. E., and Muntz, E. P., "An Evaluation of a Multiple-Stage Micromechanical Knudsen Compressor and Vacuum Pump, " in 20th International Symposium on Rarefied Gas Dynamics, edited by C. Shen, Peking University Press, Beijing, China, 1996, 995-1000.
4. Silica Aerogels-Thermal Properties, website http://eande. lbl. gov/ECS/Aerogels/satcond. htm/, last updated May 5, 1999.
5. Hua, D. W., Anderson, J., Di Gregorio, J., Smith, D. M., and Beaucage, G., J. Non-Crystalline Solids 186, 142-148 (1995).