Gas flow in nano-channels: Thermal transpiration models with application to a Si-micromachined Knudsen pump

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2329-2332

  Gupta, Naveen K ^a   Masters, Nathan D ^b   Ye, Wenjing ^b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

DSMC; Knudsen pump; Monte Carlo; Rarefied gas dynamics; Thermal transpiration

Indexed keywords

ACTUATORS; AERODYNAMICS; FLOW OF GASES; GAS DYNAMICS; MICROSYSTEMS; MODAL ANALYSIS; PUMPS; SENSORS; SILICON; TRANSDUCERS; TRANSPIRATION; VACUUM PUMPS;

CHANNEL HEIGHT; COMPARATIVE STUDIES; DIRECT SIMULATION MONTE CARLO; DSMC; EXPERIMENTAL DATA; GAS FLOWING; GLASS SUBSTRATES; INTERNATIONAL CONFERENCES; KNUDSEN PUMP; MASS FLOW RATES; MICROMACHINED; MONTE CARLO; NANO-CHANNELS; PERFORMANCE PARAMETERS; RAREFIED GAS DYNAMICS; RAREFIED GAS FLOWS; SCALIN G ANALYSIS; SEMI-ANALYTICAL MODELING; SIMULATION RESULTS; SOLID-STATE SENSORS; TEST CASES; THERMAL TRANSPIRATION;

SENSITIVITY ANALYSIS;

EID: 50049099520     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300636     Document Type: Conference Paper

References (13)

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