A Knudsen pump using nanoporous zeolite for atmospheric pressure operation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 38-41

  Gupta, Naveen K ^a,b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ATMOSPHERICS; CLIMATOLOGY; COMPOSITE MICROMECHANICS; COOLING; COOLING SYSTEMS; DIESEL ENGINES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METEOROLOGY; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; VACUUM PUMPS;

CLINOPTILOLITE; FLOW CHANNELS; FLOW-RATE; GAS ANALYZERS; INTERNATIONAL CONFERENCES; KNUDSEN PUMP; MAXIMUM PRESSURE; MICRO-ELECTRO MECHANICAL SYSTEMS; MOVING PARTS; NANOPOROUS ZEOLITE; PORE DIAMETERS; PRESSURE LOADS; ROOM TEMPERATURES; TRANSITIONAL FLOW REGIMES;

PUMPS;

EID: 50149121393     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443587     Document Type: Conference Paper

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