How to make single small holes with large aspect ratios

Physica Status Solidi - Rapid Research Letters

Volumn 3, Issue 2-3, 2009, Pages 55-57

  Föll, Helmut ^a   Gerngroß, Mark Daniel ^a   Cojocaru, Ala ^a   Leisner, Malte ^a   Bahr, Jörg ^a   Carstensen, Jürgen ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP HOLES; INP; LARGE ASPECT RATIO; PROOF OF PRINCIPLES; SINGLE HOLE; SMALL HOLE;

ASPECT RATIO; PRESSURE DROP;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 71149118579     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.200802257     Document Type: Article

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