Electric field effects on the formation of isolated macro porous silicon

ECS Transactions

Volumn 16, Issue 3, 2009, Pages 143-155

  Vanga, L K ^a   Oisten, M K ^a   Ritzdorf, T L ^b   Bergstrom, P L ^a  

^a Michigan Technological University   (United States)

^b Semitool Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POROUS SILICON;

ELECTRO-CHEMICAL ANODIZATION; ISOLATED PORES; MACRO POROUS SILICON; PATTERNED FEATURES; PORE FORMATION; PROCESS MODELING; PYRAMIDAL PITS; SILICON SUBSTRATES;

ELECTRIC FIELD EFFECTS;

EID: 63849241532     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2982551     Document Type: Conference Paper

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