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Volumn 204, Issue 9-10, 2010, Pages 1528-1534
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Mechanical and tribological properties of multicomponent Ti-B-C-N thin films with varied C contents
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Author keywords
Dynamic impact test; Hardness; Multicomponent Ti B C N films; Reactive unbalanced magnetron sputtering; Wear
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Indexed keywords
ADHESIVE FAILURE;
ADHESIVE STRENGTH;
AMORPHOUS STRUCTURES;
C INCORPORATION;
CN FILM;
CRITICAL LOAD;
DC MAGNETRON SPUTTERING;
DRY CONDITION;
DYNAMIC IMPACTS;
FRICTION AND WEAR BEHAVIORS;
FRICTIONAL COEFFICIENTS;
HIGH HARDNESS;
MECHANICAL ANALYSIS;
MECHANICAL AND TRIBOLOGICAL PROPERTIES;
MICRO INDENTATION;
MICROSCRATCHES;
MULTICOMPONENT FILMS;
MULTICOMPONENT THIN FILMS;
MULTICOMPONENTS;
PIN ON DISC TRIBOMETER;
PIN-ON-DISC-TESTS;
REACTIVE UNBALANCED MAGNETRON SPUTTERING;
ROCKWELL;
ROOT MEAN SQUARE ROUGHNESS;
SI(1 0 0);
TRIBOLOGICAL PROPERTIES;
WEAR MECHANISMS;
ATOMIC FORCE MICROSCOPY;
DYNAMIC PROGRAMMING;
FRICTION;
HARDNESS;
HARDNESS TESTING;
IMPACT TESTING;
INORGANIC COATINGS;
MAGNETRONS;
MECHANISMS;
METALLIC FILMS;
NATURAL FREQUENCIES;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
STATISTICAL TESTS;
SURFACE TESTING;
THIN FILMS;
TRIBOLOGY;
MECHANICAL PROPERTIES;
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EID: 71049142597
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.09.078 Document Type: Article |
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Times cited : (32)
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References (22)
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