Study of the composition and of the mechanical properties of TiBN films obtained by d.c. magnetron sputtering

Surface and Coatings Technology

Volumn 91, Issue 1-2, 1997, Pages 74-82

  Chaleix, L ^a   Machet, J ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

Composition; D.c. magnetron sputtering; Mechanical properties; TiBN firm

Indexed keywords

ADHESION; BORON COMPOUNDS; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; TITANIUM COMPOUNDS; TITANIUM NITRIDE; WEAR RESISTANCE;

INTRINSIC STRESS; MICROHARDNESS;

CERAMIC MATERIALS;

EID: 0031130558     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03139-8     Document Type: Article

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