Carbon nitride based hard multilayer films prepared by closed field unbalanced magnetron sputtering

Surface Engineering

Volumn 22, Issue 1, 2006, Pages 15-25

  Vyas, A ^a   Li, L K Y ^a   Zhou, Z F ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Amorphous carbon films; Bonding structure; Magnetron sputtering; Multilayer; Raman spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; MULTILAYERS; NANOSTRUCTURED MATERIALS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS CARBON FILMS; BONDING STRUCTURE; NANOHARDNESS;

CARBON NITRIDE;

EID: 33746256449     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/174329406X85047     Document Type: Article

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