Investigation of nanostructure evolution and twinning of nanocrystallites in Ti-Bx-Ny nanocomposite thin films deposited by magnetron sputtering at low temperature by means of HRTEM and Monte Carlo simulations

Acta Materialia

Volumn 54, Issue 11, 2006, Pages 2897-2905

  Lu, Y H ^a,b   Liu, Z J ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

High resolution transmission electron microscopy; Monte Carlo simulation; Nanostructure; Ti Bx Ny thin films; Twinning deformation

Indexed keywords

COMPUTER SIMULATION; MAGNETRON SPUTTERING; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; TI-BX-NY THIN FILMS; TWINNING DEFORMATION;

THIN FILMS;

EID: 33646850408     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2006.02.027     Document Type: Article

References (26)

1. Li S.Z., Shi Y.L., and Peng H.R. Plasma Chem Plasma Process 12 (1992) 287
2. Son M.J., Kang S.S., Lee E.A., and Kim K.H. J Mater Process Technol 130-131 (2002) 266
3. Veprek S., and Reiprich S. Thin Solid Films 268 (1995) 64
4. Karvankova P., Veprek-Heijman M.G.J., Zindulka O., Bergmaier A., and Veprek S. Surf Coat Technol 163-164 (2003) 149
5. Hammer P., Steiner A., Villa R., et al. Surf Coat Technol 68-69 (1994) 194
6. Gissler W., Baker M.A., Haupt J., Gibson P.N., Gilmore R., and Mollart T.P. Diamond Film Technol 7 (1997) 165
7. Gissler W. Surf Coat Technol 68-69 (1994) 556
8. Veprek S. J Vac Sci Technol A 17 (1999) 2401
9. Demkowicz M.J., and Argon A.S. Phys Rev Lett 93 (2004) 025505
10. Veprek S., Mukherjec S., Karvankova P., Männling H.-D., He J.L., Moto K., Prochazka J., and Argon A.S. J Vac Sci Technol A 21 (2003) 532
11. Mazor A., Srolovitz D.J., Hagan P.S., and Bukiet B.G. Phys Rev Lett 60 (1988) 424
12. Srolovitz D.J., Mazor A., and Bukiet B.G. J Vac Sci Technol A 6 (1988) 2371
13. Baker M.A., Mollart T.P., Gibson P.N., and Gissier W. J Vac Sci Technol A 15 (1997) 284
14. Liu Z.J., Zhang C.H., Shen Y.G., and Mai Y.M. J Appl Phys 95 (2004) 758
15. Tamura M., and Kubo H. Surf Coat Technol 54/55 (1992) 255
16. Carrasco C.A., Vergara V.S., Benavente R.G., Mingolo N., and Rios J.C. Mater Character 48 (2002) 81
17. Sundgren J.E., Rockett A., and Greene J.E. J Vac Sci Technol A 4 (1986) 2770
18. Novotny H., Benesovsky F., Brukl C., and Schob O. Mater Chem 92 (1961) 403
19. Rauschenbach B., and Gerlach J.W. Cryst Res Technol 35 (2000) 675
20. Barna P.B., and Adamik M. Thin Solid Films 317 (1998) 27
21. Barna P.B., and Adamik M. Surf Coat Technol 125 (2000) 147
22. Ruchschloss M., Landkammer B., and Veprek S. Appl Phys Lett 63 (1974) 1474
23. Liao X.Z., Huang J.Y., Zhu Y.T., Zhou F., and Lavernia E.J. Philos Mag 83 (2003) 3065
24. Gray G.T. Acta Mater 46 (1988) 1827
25. Mahajan S., and Williams D.F. Int Metall Rev 18 (1973) 43
26. Stiegler JO, Mchargue CJ. In: Reed-Hill RE, Hirth JP, Rogers HC, editors, Deformation twinning. New York, NY: 1964. p. 209.