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Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4185-4189

Syntheses and mechanical properties of Ti-B-C-N coatings by a plasma-enhanced chemical vapor deposition

(6) Kim, Kwang Ho a Ok, Jung Tae a Abraham, Sudeep a Cho, Young Rae a Park, In Wook b Moore, John J b

a Pusan National University (South Korea)

b Department of Geology and Geological Engineering (United States)

Author keywords

Boron content; Friction coefficient; Microhardness; PECVD; Ti B C N

Indexed keywords

BORON; COATINGS; MECHANICAL PROPERTIES; MICROHARDNESS; SILICON WAFERS; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOSITE MICROSTRUCTURE; FRICTION COEFFICIENT;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

BORON; COATINGS; MECHANICAL PROPERTIES; MICROHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33751219243 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2006.08.051 Document Type: Article

Times cited : (21)

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