Binary-coded 4.25-bit W-band monocrystallineSilicon MEMS multistage dielectric-block phase shifters

IEEE Transactions on Microwave Theory and Techniques

Volumn 57, Issue 11, 2009, Pages 2834-2840

  Somjit, Nutapong ^a   Stemme, Göran ^a   Oberhammer, Joachim ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Microelectromechanical systems (MEMS); Microwave; Millimeter wave; Phase shifter; RF MEMS

Indexed keywords

COPLANAR TRANSMISSION LINES; DIELECTRIC CONSTANTS; HIGH RESISTIVITY SILICON; INPUT POWER; INTERCEPT POINTS; MEMS PHASE SHIFTER; METALLIC BRIDGE; MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMACHINED; MILLIMETER WAVE PHASE SHIFTERS; MONOCRYSTALLINE SILICON; NOMINAL FREQUENCY; NONLINEARITY MEASUREMENTS; NOVEL CONCEPT; PERIODIC PATTERN; PHASE COMBINATIONS; POWER HANDLING; RE-CONFIGURABLE; RF-MEMS; THIN AIR; THIRD ORDER; TRANSMISSION LINE;

ACTUATORS; APPROXIMATION THEORY; BANDPASS FILTERS; DIELECTRIC MATERIALS; ELECTRIC LINES; ELECTROSTATIC ACTUATORS; HETEROJUNCTION BIPOLAR TRANSISTORS; INSERTION LOSSES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; MILLIMETER WAVE DEVICES; MILLIMETER WAVES; PHASE SHIFT; PHASE SHIFTERS; TEMPERATURE MEASUREMENT; TRANSMISSION LINE THEORY;

COMPOSITE MICROMECHANICS;

EID: 70450280774     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2009.2032350     Document Type: Article

References (28)

1. M. C. Scardelletti, G. E. Ponchak, A. J. Zaman, and R. Q. Lee, "RF MEMS phase shifters and their application in phase array antennas," in Proc. IEEE Annu.Wireless Microw. Technol. Conf., 2005, pp. 191-194.
2. G. L. Tan, R. E. Mihailovich, J. B. Hacker, J. F. DeNatale, and G. M. Rebeiz, "A very-low-loss 2-bit K-band RF MEMS phase shifter," in Proc. IEEE MTT-S Int. Microw. Symp. Dig., 2002, vol.1, pp. 333-335.
3. A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke, and C. L. Goldsmith, "X-band RF MEMS phase shifters for phased array applications," IEEE Microw. Guided Wave Lett., vol.9, no.12, pp. 517-519, Dec. 1999.
4. B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, "Ka-band RF MEMS phase shifters," IEEE Microw. Guided Wave Lett., vol.9, no.12, pp. 520-522, Dec. 1999.
5. M. C. Scardelletti, G. E. Ponchak, and N. C. Varaljay, "Ka-band, MEMS switched line phase shifters implemented in finite ground coplanar waveguide," in Proc. 32nd Eur. Microw. Conf., Oct. 2002, pp. 1-4.
6. N. Kingsley, P. Kirby, G. Ponchak, and J. Papapolymerou, "14 GHz MEMS 4-bit phase shifter on silicon," in Proc. Silicon Monolithic Integr. Circuits in RF Syst. Top. Meeting, Sep. 8-10, 2004, pp. 326-328.
7. Y. Liu, A. Borgioli, A. S. Nagra, and R. A. York, "K-band 3-bit lowloss distributed MEMS phase shifter," IEEE Microw. Guided Wave Lett., vol.10, no.10, pp. 415-417, Oct. 2000. (Pubitemid 32067967)
8. J. S. Hayden and G. M. Rebeiz, "Very low-loss distributed X-band and Ka-bandMEMSphase shifters using metal-air-metal capacitors," IEEE Trans. Microw. Theory Tech., vol.51, no.1, pp. 309-314, Jan. 2003.
9. J. J. Hung, L. Dussopt, and G. M. Rebeiz, "Distributed 2- and 3-bit--band MEMS phase shifters on glass substrates," IEEE Trans. Microw. Theory Tech., vol.52, no.2, pp. 600-606, Feb. 2004.
10. G. McFeetors and M. Okoniewski, "Distributed MEMS analog phase shifter with enhanced tuning," IEEE Microw. Wireless Compon. Lett., vol.16, no.1, pp. 34-36, Jan. 2006.
11. H. T. Kim, J. H. Park, S. Lee, S. Kim, J. M. Kim, Y. K. Kim, and Y. Kwon, "Ka-band 2-b and 4-b low-loss and low-voltage distributed MEMS digital phase shifter using metal-air-metal capacitors," IEEE Trans. Microw. Theory Tech., vol.50, no.12, pp. 2918-2923, Dec. 2002.
12. J. J. Hung, L. Dussopt, and G. M. Rebeiz, "A low-loss distributed 2-bit Ka-band MEMS phase shifter," in Proc. 33rd Eur. Microw. Con., Oct. 2003, pp. 983-985.
13. J. B. Rizk, E. Chaiban, and G. M. Rebeiz, "Steady state thermal analysis and high-power reliability considerations of RF MEMS capacitive switches," in IEEE MTT-S Int. Microw. Symp. Dig., 2002, vol.1, pp. 239-242.
14. F. Coccetti, B. Ducarouge, E. Scheid, D. Dubuc, K. Grenier, and R. Plana, "Thermal analysis of RF-MEMS switches for power handling front-end," in Proc. Eur. Microw. Conf., Oct. 4-6, 2005, vol.3, pp. 1-4.
15. L. L. W. Chow, Z. Wang, B. D. Jensen, K. Saitou, J. L. Volakis, and K. Kurabayashi, "Skin-effect self-heating in air-suspended RF MEMS transmission-line structures," J. Microelectromech. Syst., vol.15, pp. 1622-1631, Dec. 2006.
16. N. Somjit, G. Stemme, and J. Oberhammer, "Novel RF MEMS mechanically tunable dielectric phase shifter," in Proc. 33rd Infrared, Millimeter, Terahertz Waves, Sep. 15-19, 2008, pp. 1-2.
17. N. Somjit, G. Stemme, and J. Oberhammer, "Novel concept of microwave MEMS reconfigurable 7×45 multi-stage dielectric-block phase shifters," in Proc. IEEE Int. MEMS Conf. , Jan. 2009, pp. 15-18.
18. M. Populin, A. Decharat, F. Niklaus, and G. Stemme, "Thermosetting nano-imprint resists: Novel materials for adhesive wafer bonding," in Proc. IEEE 20th Int. MEMS Conf., Jan. 21-25, 2007, pp. 239-242.
19. S. E. Shih, D. W. Duan, O. Fordham, M. Parmar,K. Tornquist, X. Zeng, P. Chang-Chien, and R. Tsai, "A W-band 4-bit phase shifter in multilayer scalable array systems," in IEEE Compound Semiconduct. Integr. Circuits Symp., Oct. 14-17, 2007, pp. 1-4.
20. A. Stehle, G. Georgiev, V. Ziegler, B. Schoenlinner, U. Prechtel, H. Seidel, and U. Schmid, "RF-MEMS switch and phase shifter optimized for W-band," in Proc. 38th Eur. Microw. Conf., Oct. 2008, pp. 1-4.
21. J. B. Rizk and G. M. Rebeiz, "W-band CPW RF MEMS circuits on quartz substrates," IEEE Trans. Microw. Theory Tech., vol.51, no.7, pp. 1857-1862, Jul. 2003.
22. J. B. Rizk and G. M. Rebeiz, "W-band microstrip RF-MEMS switches and phase shifters," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 8-13, 2003, vol.3, pp. 1485-1488.
23. L. Dussopt and G. M. Rebeiz, "Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable filters," IEEE Trans. Microw. Theory Tech., vol.51, no.4, pp. 1247-1256, Apr. 2003.
24. D. Girbau, N. Otegi, L. Pradell, and A. Lázaro, "Study of intermodulation in RF MEMS variable capacitors," IEEE Trans. Microw. Theory Tech., vol.54, no.3, pp. 1120-1130, Mar. 2006.
25. M. Innocent, P. Wambacq, H. A. C. Tilrnans, W. Sansen, and H. De Man, "Measurement of the nonlinear behavior of a MEMS variable capacitor," in Proc. 17th IEEE Int. MEMS Conf., 2004, pp. 773-776.
26. D. Mercier, P. Blondy, D. Cros, and P. Guillon, "An electromechanical model for MEMS switches," in IEEE MTT-S Int. Microwave Symp. Dig., Phoenix, AZ, Jun. 2001, pp. 2123-2126.
27. G. M. Rebeiz, RF MEMS Theory, Design and Technology, 1st ed. Hoboken, NJ: Wiley, 2003, pp. 457-471.
28. J. C. Blair, C. R. Fuller, P. B. Ghate, and C. T. Haywood, "Electromigration- induced failures in, and microstructure and resistivity of, sputtered gold films," J. Appl. Phys., vol.43, no.2, pp. 307-311, Feb. 1972.