A low-loss distributed 2-bit W-band MEMS phase shifter

Conference Proceedings - 33rd European Microwave Conference, EuMC 2003

Volumn 3, Issue , 2003, Pages 983-985

  Hung, Juo Jung ^a   Dussopt, Laurent ^b   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COPLANAR WAVEGUIDES; ELECTROMECHANICAL DEVICES; MEMS; PHASE SHIFTERS; SUBSTRATES;

COPLANAR WAVE-GUIDE (CPW); DISTRIBUTED MICROELECTROMECHANICAL SYSTEM; GLASS SUBSTRATES; LOW-LOSS; MEMS PHASE SHIFTER; MEMS SWITCHES; W-BAND FREQUENCIES; WIDE-BAND;

TUNGSTEN;

EID: 33847106401     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2003.177646     Document Type: Conference Paper

References (5)

1. J. S. Hayden and G. M. Rebeiz, "Veiy Low-Loss Distributed X-Band and Ka-Band MEMS Phase Shifters Using Metal-Air-Metal capacitors," IEEE Transactions on Microwave Theory and Techniques, vol. 51, no. 1, pp. 309-314, January 2003.
2. J. S. Hayden, A. Malczewski, J. Kteber, C. L. Goldsmith, G. M. Rebeiz, "2 and 4-Bit DC-18 GHz Microstrip MEMS Distributed Phase Shifters," 2001 IEEE MTT-S Int. Microwave Symp. Dig., Phoenix, AZ, May 2001, pp. 219-222.
3. N. S. Barker, G. M. Rebeiz, "Optimization of Distributed MEMS Transmission-Line Phase Shifters - U-Band and W-Band Design," IEEE Transactions on Microwave Theory and Techniques, vol. 48, no. 11, pp. 1957-1966, November 2000.
4. H. T. Kim and J. H. Park and S. Lee and S. Kim and J. M. Kim and Y. K. Kim and Y. Kwon, "V-Band 2-b and Cb Low-Loss and Low-Voltage Distributed MEMS Digital Phase Shifter Using Metal-Air-Metal Capacitors," IEEE Trnnsocrions on Microwave Theory and Techniques. vol. 50. no. 12, pp. 2918-2923, Deceber 2002.
5. Y. Liu and A. Borgioli and A. S. Nagra and R. A. York 'K-hand 3-bit low-loss distributed MEMS phase shifter," IEEE Microwave Guided Wave Lett.", vol. 10, pp. 415-417. October 2000.