Novel concept of microwave mems reconfigurable 7×45° multi-stage dielectric-block phase shifter

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 15-18

  Somjit, N ^a   Stemme, G ^a   Oberhammer, J ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATION; HIGH RESISTIVITY SILICON; MEASUREMENT RESULTS; MEMS PHASE SHIFTER; MICROMACHINED; MICROWAVE SIGNALS; MULTI-STAGE; NOVEL CONCEPT; PROPAGATION CONSTANT; RE-CONFIGURABLE; RELATIVE PHASE; RETURN LOSS; SINGLE STAGE; ULTRA-BROADBAND; WAFER-SCALE;

COPLANAR WAVEGUIDES; ELECTROSTATIC ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROWAVES; PHASE SHIFTERS; SILICON WAFERS; THREE DIMENSIONAL;

PHASE SHIFT;

EID: 65949124715     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805307     Document Type: Conference Paper

References (5)

1. N. S. Barker, G. M. Rebeiz, "Distributed MEMS True-Time Delay Phase Shifters and Wideband Switches," in IEEE Trans. on Microwave Theory and Techniques, VOL.46, NO. 11, November 1998. (Pubitemid 128738908)
2. N. S. Barker and G. M. Rebeiz, "Optimization of Distributed MEMS Transmission Line Phase Shifters U-Band and W-Band Designs," IEEE Trans. Microwave Theory and Techn, vol.48, pp. 1957- 1966 Nov. 2000.
3. G. M. Rebeiz, "RF MEMS: Theory, Design, and Technology," Wiley; 1st edition, June 15, 2002
4. J. J. Hung, L. Dussopt and G. M. Rebeiz, "A Low- Loss Distributed 2-Bit W-Band MEMS Phase Shifter," in 33rd European Microwave Conference, pp. 983-985, October 2003.
5. M. Populin, A. Decharat, F. Nuklaus and G. Stemme, "Thermosetting Nano-Imprint Resists: Novel Materials for Adhesive Wafer Bonding," in IEEE 20th International Conference on Micro Electro Mechanical Systems, pp. 239-242, 21-25 January 2007.