W-band CPW RF MEMS circuits on quartz substrates

IEEE Transactions on Microwave Theory and Techniques

Volumn 51, Issue 7, 2003, Pages 1857-1862

  Rizk, Jad B ^a,b   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Microelectromechanical system (MEMS); Microwave; Millimeter wave; Phase shifters; Switches

Indexed keywords

BANDWIDTH; CAPACITANCE; ELECTRIC SWITCHES; IMPEDANCE MATCHING (ELECTRIC); INSERTION LOSSES; MILLIMETER WAVE DEVICES; PHASE SHIFTERS;

SHUNT SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 0042308601     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2003.814316     Document Type: Article

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