Measurement of the nonlinear behavior of A MEMS variable capacitor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 773-776

  Innocent, Manuel ^a,b   Wambacq, Piet ^a   Tilmans, Harrie A C ^a   Sansen, Willy ^b   De Man, Hugo ^c  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c ESAT MICAS ^*  (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS VOLTAGE; DISPLACEMENT TRANSFER FUNCTION; TUNABLE FILTERS; VARIABLE CAPACITORS;

CAPACITORS; COMPUTER SIMULATION; ELECTRIC IMPEDANCE; MATHEMATICAL MODELS; NATURAL FREQUENCIES; NONLINEAR SYSTEMS; SPECTRUM ANALYZERS; TRANSFER FUNCTIONS; TUNING; VOLTAGE MEASUREMENT; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 3042820691     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. M. Innocent, P. Wambacq, S. Donnay, H. A.C. Tilmans, W. Sansen, and H. De Man, "An analytic Volterra-series-based model for a MEMS variable capacitor," IEEE Trans. Computer-Aided Design of Integrated Circuits and Systems, vol. 22, no. 2, pp. 124-131, Feb. 2003.
2. H.A.C. Tilmans, "MEMS components for wireless communications," Proceedings of EUROSENSORS XVI, pp. 1-34, Sep. 2002.
3. R. Navid, J. R. Clark, M. Demirci and C. T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators," Proc. 14th IEEE Int. Conference on MEMS, pp. 228-231, 2001.
4. [4| Martin Schetzen, The Volterra and Wiener theories of nonlinear systems, John Wiley &Sons, 1980.
5. L. Dussopt and G.M. Rebeiz, "Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable fi 1ters," IEEE Transactions on Microwave Theory and Techniques, vol. 51, no. 4, pp. 1247-1256, apr 2003.