Study of intermodulation in RF MEMS variable capacitors

IEEE Transactions on Microwave Theory and Techniques

Volumn 54, Issue 3, 2006, Pages 1120-1130

  Girbau, David ^a,b   Otegi, Nerea ^c   Pradell, Lluís ^a,b   Lázaro, Antonio ^d  

^a IEEE   (Spain)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^c UNIVERSITY OF THE BASQUE COUNTRY UPV EHU   (Spain)

^d UNIVERSITAT ROVIRA I VIRGILI   (Spain)

Author keywords

Intermodulation distortion (IMD); MEMS varactor; Microelectromechanical systems (MEMS); Self actuation; Two tone IMD measurement

Indexed keywords

INTERMODULATION DISTORTION (IMD); MEMS VARACTOR; MICROELECTROMECHANICAL SYSTEMS (MEMS); SELF-ACTUATION; TWO-TONE IMD MEASUREMENT;

ELECTRIC DISTORTION; INTERMODULATION; MEASUREMENT THEORY; MICROELECTROMECHANICAL DEVICES; RADIOFREQUENCY SPECTROSCOPY; REFLECTION;

CAPACITORS;

EID: 33644979946     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2005.864116     Document Type: Article

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