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Volumn 31, Issue 4, 2004, Pages 355-361

A three-DOF compliant micromotion stage with flexure hinges

Author keywords

Actuators; Microcontrollers

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; HINGES; KINEMATICS; MICROACTUATORS; MICROCONTROLLERS; MOTION CONTROL;

EID: 3042830852     PISSN: 0143991X     EISSN: None     Source Type: Journal    
DOI: 10.1108/01439910410541873     Document Type: Article
Times cited : (75)

References (10)
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  • 2
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    • Gao, P.1    Swei, S.2    Yuan, Z.3
  • 5
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    • A loop-closure theory for the analysis and synthesis of compliant mechanisms
    • Howell, L.L. and Midha, A. (1996), "A loop-closure theory for the analysis and synthesis of compliant mechanisms", Journal of Mechanical Design, Vol. 118, pp. 121-5.
    • (1996) Journal of Mechanical Design , vol.118 , pp. 121-125
    • Howell, L.L.1    Midha, A.2
  • 6
    • 0345490471 scopus 로고
    • Direct kinematic and dynamics of a planar three-dof parallel manipulator
    • Ma, O. and Angeles, J. (1993), "Direct kinematic and dynamics of a planar three-dof parallel manipulator", Advances in Design Automation, Vol. 2, pp. 313-20.
    • (1993) Advances in Design Automation , vol.2 , pp. 313-320
    • Ma, O.1    Angeles, J.2
  • 7
    • 0031176660 scopus 로고    scopus 로고
    • Optimal design of a flexure hinge based XYθ wafer stage
    • Ryu, J., Gweon, D. and Moon, K. (1997), "Optimal design of a flexure hinge based XYθ wafer stage", Precision Engineering, Vol. 21, pp. 18-28.
    • (1997) Precision Engineering , vol.21 , pp. 18-28
    • Ryu, J.1    Gweon, D.2    Moon, K.3
  • 8
    • 0018222158 scopus 로고
    • Piezodriven 50 μm range stage with subnanometer resolution
    • Scire, F. and league, C. (1978), "Piezodriven 50 μm range stage with subnanometer resolution", Rev. Sci. Instrum, Vol. 49 No. 12, pp. 1735-41.
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    • Scire, F.1    League, C.2
  • 10
    • 0036469932 scopus 로고    scopus 로고
    • Constant-Jacobian method for kinematics of a 3-DOF planar micro-motion stage
    • Zhang, W.J., Zou, J., Watson, G., Zhao, W., Zong, G. and Bi, S. (2002), "Constant-Jacobian method for kinematics of a 3-DOF planar micro-motion stage". Journal of Robotic Systems, Vol. 19 No. 2, pp. 63-79.
    • (2002) Journal of Robotic Systems , vol.19 , Issue.2 , pp. 63-79
    • Zhang, W.J.1    Zou, J.2    Watson, G.3    Zhao, W.4    Zong, G.5    Bi, S.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.