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Volumn , Issue , 2007, Pages

Sensor fusion for improved control of piezoelectric tube scanners

Author keywords

Capacitive sensor; Piezoelectric strain sensor; Sensor fusion; Tube scanner

Indexed keywords

ACOUSTOOPTICAL EFFECTS; ASYMPTOTIC ANALYSIS; ELECTRONICS INDUSTRY; ENVIRONMENTAL ENGINEERING; MECHATRONICS; NONLINEAR CONTROL SYSTEMS; OPTICAL PROPERTIES; PHOTORESISTS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; SCANNING; SENSOR DATA FUSION; SENSORS; TELECOMMUNICATION SYSTEMS; TRANSDUCERS; TUBES (COMPONENTS);

EID: 48649090397     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AIM.2007.4412431     Document Type: Conference Paper
Times cited : (4)

References (22)
  • 2
  • 3
    • 36549095714 scopus 로고
    • Single-tube three-dimensional scanner for scanning tunneling microscopy
    • August
    • G. Binnig and D. P. E. Smith, "Single-tube three-dimensional scanner for scanning tunneling microscopy," Review of Scientific Instruments, vol. 57, no. 8, pp. 1688-1689, August 1986.
    • (1986) Review of Scientific Instruments , vol.57 , Issue.8 , pp. 1688-1689
    • Binnig, G.1    Smith, D.P.E.2
  • 7
    • 0032625888 scopus 로고    scopus 로고
    • Optimal tracking of piezo-based nanopositioners
    • D. Croft, S. Stilson, and S. Devasia, "Optimal tracking of piezo-based nanopositioners," Nanotechnology, vol. 10, pp. 201-208, 1999.
    • (1999) Nanotechnology , vol.10 , pp. 201-208
    • Croft, D.1    Stilson, S.2    Devasia, S.3
  • 8
    • 22944475297 scopus 로고    scopus 로고
    • A grounded load charge amplifier for reducing hysteresis in piezoelectric tube scanners
    • Online, Available: PDFs/J05d.pdf, July
    • A. J. Fleming and S. O. R. Moheimani, "A grounded load charge amplifier for reducing hysteresis in piezoelectric tube scanners," Review of Scientific Instruments, vol. 76, no. 7, July 2005. [Online]. Available: PDFs/J05d.pdf
    • (2005) Review of Scientific Instruments , vol.76 , Issue.7
    • Fleming, A.J.1    Moheimani, S.O.R.2
  • 9
    • 32944468063 scopus 로고    scopus 로고
    • Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners
    • Online, Available: PDFs/J06b.pdf, January
    • _, "Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners," IEEE Transactions on Control Systems Technology, vol. 14, no. 1, pp. 33-44, January 2006. [Online]. Available: PDFs/J06b.pdf
    • (2006) IEEE Transactions on Control Systems Technology , vol.14 , Issue.1 , pp. 33-44
    • Fleming, A.J.1    Moheimani, S.O.R.2
  • 11
    • 0025410869 scopus 로고
    • Positive Position Feedback Control for Large Space Structures
    • J. L. Fanson and T. K. Caughey, "Positive Position Feedback Control for Large Space Structures," AIAA Journal, vol. 28, no. 4, pp. 717-724, 1990.
    • (1990) AIAA Journal , vol.28 , Issue.4 , pp. 717-724
    • Fanson, J.L.1    Caughey, T.K.2
  • 12
    • 1542318926 scopus 로고    scopus 로고
    • Iterative feedforward compensation of hysteresis in piezo positioners
    • Maui, HI, December
    • K. Leang and S. Devasia, "Iterative feedforward compensation of hysteresis in piezo positioners," in Proc. IEEE Conference on Decision and Control, Maui, HI, December 2003.
    • (2003) Proc. IEEE Conference on Decision and Control
    • Leang, K.1    Devasia, S.2
  • 13
    • 0030193234 scopus 로고    scopus 로고
    • Subspace based multivariable system identification from frequency response data
    • July
    • T. McKelvey, H. Akcay, and L. Ljung, "Subspace based multivariable system identification from frequency response data," IEEE Transactions on Automatic Control, vol. 41, no. 7, pp. 960-978, July 1996.
    • (1996) IEEE Transactions on Automatic Control , vol.41 , Issue.7 , pp. 960-978
    • McKelvey, T.1    Akcay, H.2    Ljung, L.3
  • 15
    • 19544367801 scopus 로고    scopus 로고
    • F. J. Rubio-Sierra, W. M. Heckle, and R. . W. Stark, Nanomanipulation by atomic force microscopy, Advanced Engineering Materials, 7, no. 4, pp. 193-196, 2005.
    • F. J. Rubio-Sierra, W. M. Heckle, and R. . W. Stark, " Nanomanipulation by atomic force microscopy," Advanced Engineering Materials, vol. 7, no. 4, pp. 193-196, 2005.
  • 17
    • 3042609738 scopus 로고    scopus 로고
    • Fast contact-mode atomic force microscopy on biological specimens by model-based control
    • G. Schitter, R. W. Stark, and A. Stemmer, "Fast contact-mode atomic force microscopy on biological specimens by model-based control," Ultramicroscopy, vol. 100, pp. 253-257, 2004.
    • (2004) Ultramicroscopy , vol.100 , pp. 253-257
    • Schitter, G.1    Stark, R.W.2    Stemmer, A.3
  • 19
    • 0028756247 scopus 로고
    • Feedback control of piezoelectric tube scanners
    • Lake Buena Vista, FL, December
    • N. Tamer and M. Dahleh, "Feedback control of piezoelectric tube scanners," in Proc. American Control Conference, Lake Buena Vista, FL, December 1994, pp. 1826-1831.
    • (1994) Proc. American Control Conference , pp. 1826-1831
    • Tamer, N.1    Dahleh, M.2
  • 20
    • 29044443869 scopus 로고    scopus 로고
    • Nanofabrication by scanning probe microscope lithography: A review
    • May/June
    • A. A. Tsenga, A. Notargiacomob, and T. P. Chen, "Nanofabrication by scanning probe microscope lithography: A review," Journal of Vacuum Science and Technology, vol. 23, no. 3, pp. 877-894, May/June 2005.
    • (2005) Journal of Vacuum Science and Technology , vol.23 , Issue.3 , pp. 877-894
    • Tsenga, A.A.1    Notargiacomob, A.2    Chen, T.P.3
  • 21
    • 33746294097 scopus 로고    scopus 로고
    • Augmented reality user interface for an atomic force microscope-based nanorobotic system
    • July
    • W. Vogl, B. Kai-Lam Ma, and M. Sitti, "Augmented reality user interface for an atomic force microscope-based nanorobotic system," IEEE Transactions on Nanotechnology, vol. 5, no. 4, pp. 397-406, July 2006.
    • (2006) IEEE Transactions on Nanotechnology , vol.5 , Issue.4 , pp. 397-406
    • Vogl, W.1    Kai-Lam Ma, B.2    Sitti, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.