Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arraying

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Volumn , Issue , 2009, Pages 58-63

  Lin, Yang ^a   Li, Wei Chang ^a   Kim, Bongsang ^a   Lin, Yu Wei ^b   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b BROADCOM CORPORATION   (United States)

Author keywords

LSI; Mechanical circuit; MEMS; Micromechanical filter; RF MEMS; Standard deviation; VLSI; Wireless communications

Indexed keywords

LSI; MECHANICAL CIRCUIT; MICROMECHANICAL FILTER; RF MEMS; STANDARD DEVIATION; VLSI; WIRELESS COMMUNICATIONS;

BANDWIDTH; DIES; DISKS (STRUCTURAL COMPONENTS); FREQUENCY STANDARDS; LSI CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; STATISTICS; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROWAVE FILTERS;

EID: 70449490688     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2009.5168142     Document Type: Conference Paper

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