Embedded MEMS filter chip and its fabrication for VHF applications

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 290-293

  Mitarai, Shun ^a   Tada, Masahiro ^a   Yanagawa, Shusaku ^a   Yamaguchi, Toshihiro ^b   Kinoshita, Takashi ^a   Tanaka, Masahiro ^a   Ikeda, Koichi ^a   Yamashita, Keitaro ^a  

^a SONY CORPORATION   (Japan)

^b Mixed Signal Device Business Group   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; RESONATORS; SILICON WAFERS;

FREQUENCY SPECTRA; PROCESS DAMAGE;

MICROPROCESSOR CHIPS;

EID: 33847748575     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. C. T.-C. Nguyen, "Vibrating RF MEMS for next generation wireless applications," Proceedings, 2004 IEEE Custom Integrated Circuits Conf., Orlando, Florida, Oct. 3-6, 2004, pp. 257-264.
2. S. Pourkamali and F. Ayazi, "SOI-based HF and VHF single-crystal Si resonators with sub-100 nm vertical capacitive gaps," Dig. of Tech. Papers, Transducers'03, Boston, Massachusetts, June 8-12, 2003, pp. 837-840.
3. F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, "High-Q HF micromechanical filters," IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000.
4. C. T.-C. Nguyen and R. T. Howe, "An Integrated CMOS Micromechanical Resonator High-Q Oscillator," Journal of Solid-State Circuits, Vol. 34, No. 4, pp. 440-455, Apr. 1999.
5. S. Lee and C. T.-C. Nguyen, "Mechanically-coupled micromechanical arrays for improved phase noise," Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 280-286.