A micropower ΔΣ-based interface ASIC for a capacitive 3-axis micro-accelerometer

IEEE Journal of Solid-State Circuits

Volumn 44, Issue 11, 2009, Pages 3193-3210

  Paavola, Matti ^a   Kämäräinen, Mika ^a   Laulainen, Erkka ^a   Saukoski, Mikko ^b   Koskinen, Lauri ^a   Kosunen, Marko ^a   Halonen, Kari A I ^a  

^a AALTO UNIVERSITY   (Finland)

^b ELMOS Semiconductor AG   (Germany)

Author keywords

front end; Low power circuit; Low voltage circuit; Microelectromechanical system (MEMS); Sensor interface; Switched capacitor circuit; Three axis accelerometer

Indexed keywords

LOW-POWER CIRCUIT; LOW-VOLTAGE CIRCUIT; MICROELECTROMECHANICAL SYSTEM (MEMS); SENSOR INTERFACE; SWITCHED-CAPACITOR CIRCUIT; THREE-AXIS ACCELEROMETER;

ACCELEROMETERS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; BANDWIDTH; CAPACITANCE; CAPACITORS; COMPOSITE MICROMECHANICS; COST REDUCTION; ELECTRIC CURRENT REGULATORS; ENERGY MANAGEMENT; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL SENSORS;

ELECTRIC NETWORK ANALYSIS;

EID: 70449490519     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2009.2031059     Document Type: Article

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