A 2.5-V 14-bit ∑Δ CMOS SOI capacitive accelerometer

IEEE Journal of Solid-State Circuits

Volumn 39, Issue 12, 2004, Pages 2467-2476

  Amini, Babak Vakili ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

CMOS SOI capacitive accelerometers; Correlated double sampling (CDS); MEMS interface circuit; Programmable switched capacitor amplifier; Sigma delta modulator

Indexed keywords

AMPLIFIERS (ELECTRONIC); CAPACITORS; CMOS INTEGRATED CIRCUITS; CORRELATION METHODS; DELTA SIGMA MODULATION; DIFFERENTIATING CIRCUITS; MICROELECTROMECHANICAL DEVICES; PULSE WIDTH MODULATION; SAMPLING; SILICON ON INSULATOR TECHNOLOGY;

CMOS SOI CAPACITIVE ACCELEROMETERS; CORRELATED DOUBLE SAMPLING (CDS); MEMS INTERFACE CIRCUITS; PROGRAMMABLE SWITCHED-CAPACITOR AMPLIFIERS; SIGMA DELTA MODULATORS;

ACCELEROMETERS;

EID: 10444247325     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2004.837025     Document Type: Conference Paper

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