Investigation of film surface roughness and porosity dependence on lattice size in a porous thin film deposition process

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 80, Issue 4, 2009, Pages

  Hu, Gangshi ^a   Huang, Jianqiao ^a   Orkoulas, Gerassimos ^a   Christofides, Panagiotis D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM MORPHOLOGY; FILM POROSITY; FILM SURFACE MORPHOLOGY; FILM SURFACES; KINETIC MONTE CARLO SIMULATION; LATTICE SIZE; NUMERICAL SIMULATION; POROSITY DEPENDENCE; POROUS THIN FILMS; STEADY-STATE VALUES; STOCHASTIC PARTIAL DIFFERENTIAL EQUATION; TRIANGULAR LATTICE;

COMPUTER SIMULATION; DEPOSITION; DIFFERENTIAL EQUATIONS; METAL ANALYSIS; MONTE CARLO METHODS; MORPHOLOGY; POROSITY; STOCHASTIC PROGRAMMING; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILM DEVICES; THIN FILMS;

SURFACE MORPHOLOGY;

EID: 70449095094     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.80.041122     Document Type: Article

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