Substitutional carbon impurities in thin silicon films: Equilibrium structure and properties

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1687-1691

  Kelires, Pantelis C ^a,b   Kaxiras, Efthimios ^b,c  

^a UNIVERSITY OF CRETE   (Greece)

^b INSTITUTE OF COMPUTER SCIENCE   (Greece)

^c HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000638378     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590035     Document Type: Article

References (11)

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