Influence of Fe-doped on structural, electronic structural and optical properties of hydrogenated amorphous carbon films prepared by plasma enhanced chemical vapor deposition

Journal of Alloys and Compounds

Volumn 487, Issue 1-2, 2009, Pages 522-526

  Zhang, Hongliang ^a,b   Wu, Weidong ^b   Wang, Wei ^a   Gong, Chengshi ^a   He, Zhibing ^b   Zhou, Ming ^a   Su, Qing ^a   Tang, Yongjian ^b   Xie, Erqing ^a  

^a LANZHOU UNIVERSITY   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Fe deep level; Fe doped; Hydrogenated amorphous carbon films; Photoluminescence

Indexed keywords

A-C:H FILMS; BAND EDGE STATE; BAND GAPS; BONDING STRUCTURE; DEEP LEVEL; DEEP-LEVEL DEFECTS; FE DEEP LEVEL; FE DOPING; FE FILMS; FE-DOPED; HYDROGENATED AMORPHOUS CARBON; HYDROGENATED AMORPHOUS CARBON (A-C:H); HYDROGENATED AMORPHOUS CARBON FILMS; METAL ORGANIC; NON-RADIATIVE RECOMBINATIONS; OPTICAL GAP; PHOTOLUMINESCENCE SPECTRUM; RAMAN SPECTRA; STRUCTURAL AND OPTICAL PROPERTIES; UV-VIS SPECTROSCOPY;

AMORPHOUS CARBON; AMORPHOUS FILMS; DOPING (ADDITIVES); HYDROGENATION; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; ORGANOMETALLICS; PHOTOLUMINESCENCE; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SEMICONDUCTOR QUANTUM WELLS; ULTRAVIOLET SPECTROSCOPY;

CARBON FILMS;

EID: 70350621336     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.08.005     Document Type: Article

References (36)

1. Wan S.H., Wang L.P., and Xue Q.J. Electrochem. Commun. 11 (2009) 99
2. Pauleau Y., Thièry F., Uglov V.V., Anishchik V.M., Kuleshov A.K., and Samtsov M.P. Surf. Coat. Technol. 180-181 (2004) 102
3. Murzina T.V., Kapra R.V., Aktsipetrov O.A., and Dorfman V.F. Appl. Phys. Lett. 83 (2003) 4749
4. Rusli, Yoon S.F., Huang Q.F., Yang H., Yu M.B., Ahn J., Zhang Q., Teo E.J., Osipowicz T., and Watt F. J. Appl. Phys. 88 (2000) 3699
5. Wu W.Y., and Ting J.M. Thin Solid Films 420-421 (2002) 166
6. Dimigen H., and Klages C.P. Surf. Coat. Technol. 49 (1991) 543
7. Miki H., Takeno T., Takagi T., Bozhko A., Shupegin M., Onodera H., Komiyama T., and Aoyama T. Diamond Relat. Mater. 15 (2006) 1898
8. Hao L.Z., Xue Q.Z., Gao X.L., Li Q., Zheng Q.B., and Yan K. J. Appl. Phys. 101 (2007) 053718
9. Lungu C.P. Surf. Coat. Technol. 200 (2005) 198
10. Yang B., Huang Z.H., Liu C.S., Fan X.J., and Fu D.J. Surf. Coat. Technol. 201 (2007) 5157
11. Endrino J.L., Escobar Galindo R., et al. Surf. Coat. Technol. 202 (2008) 3675
12. Schiffmann K.I., Fryda M., Goerigk G., Lauer R., Hinze P., and Bulack A. Thin Solid Films 347 (1999) 60
13. Luithardt W., Schmidt I., and Benndorf C. Diamond Relat. Mater. 5 (1996) 415
14. Luithardt W., and Benndorf C. Diamond Relat. Mater. 4 (1995) 346
15. Luithardt W., and Benndorf C. Thin Solid Films 290-291 (1996) 200
16. Luithardt W., and Benndorf C. Diamond Relat. Mater. 6 (1997) 533
17. Luithardt W., and Benndorf C. Solid State Ionics 101-103 (1997) 91
18. Luithardt W., and Benndorf C. Diamond Relat. Mater. 10 (2001) 2018
19. Wen X.G., Zhou K.L., Zhang Y., and Cao W.M. Thin Solid Films 303 (1997) 146
20. Benndorf C., Harnack J.T., and Fell U. Surf. Coat. Technol. 59 (1993) 345
21. Hellgren N., Macak K., Broitman E., Johansson M.P., Hultman L., and Sundgren J.-E. J. Appl. Phys. 88 (2000) 524
22. Lazar G., Bouchet-Fabre B., Zellama K., Clin M., Ballutaud D., and Godet C. J. Appl. Phys. 104 (2008) 073534
23. Ferrari A.C., and Robertson J. Phys. Rev. B 64 (2000) 075414
24. Catiglioni C., Ferrari A.C., and Robertson J. Phys. Rev. B 72 (2005) 085401
25. Ferrari A.C., and Robertson J. Phys. Rev. B 61 (2000) 14095
26. Mapelli C., Catiglioni C., Zerbi G., and Mullen K. Phys. Rev. B 60 (1999) 12710
27. Swanepoel R. J. Phys. E 16 (1983) 1214
28. Smith F.W. J. Appl. Phys. 55 (1984) 764
29. Pascual E., Serra C., and Bertran E. J. Appl. Phys. 70 (1991) 5119
30. Oppedidano C., and Tagliaferro A. Appl. Phys. Lett. 75 (1999) 3650
31. Teo K.B.K., Rodil S.E., Tsai J.T.H., Ferrari A.C., Robertson J., and Milne W.I. J. Appl. Phys. 89 (2001) 3706
32. Logothetidis S. Diamond Relat. Mater. 12 (2003) 141
33. Robertson J. Diamond Relat. Mater. 6 (1997) 212
34. Cherkashinin G., Ambacher O., Schiffer T., and Schmidt G. Appl. Phys. Lett. 88 (2006) 172114
35. Toth S., Veres M., Fule M., and Koos M. Diamond Relat. Mater. 15 (2006) 967
36. Satake A., Masumoto Y., Miyajima T., Asatsuma T., and Ikeda M. Phys. Rev. B 60 (1999) 16660