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Solid State Ionics

Volumn 101-103, Issue PART 1, 1997, Pages 91-96

Metal incorporation into diamond-like carbon films from single source metalorganic precursors

(2) Luithardt, Wolfram a Benndorf, Carsten a

a UNIVERSITY OF HAMBURG (Germany)

Author keywords

Diamond like carbon; Metal containing amorphous carbon; Nanocomposite films; R.f. plasma

Indexed keywords

AMORPHOUS FILMS; COBALT COMPOUNDS; DEPOSITION; IRON COMPOUNDS; NANOSTRUCTURED MATERIALS; ORGANOMETALLICS; PLASMA APPLICATIONS;

FERROCENE; PLASMA ACTIVATED PROCESS;

DIAMOND FILMS;

EID: 0031275805 PISSN: 01672738 EISSN: None Source Type: Journal
DOI: 10.1016/s0167-2738(97)00282-8 Document Type: Article

Times cited : (6)

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