Structure and properties of Fe-containing polymer composite films prepared by PEMOCVD

Thin Solid Films

Volumn 303, Issue 1-2, 1997, Pages 146-150

  Wen, Xiaogang ^a   Zhou, Kunlin ^a   Zhang, Yong ^a   Cao, Weimin ^a  

^a CHENGDU INSTITUTE OF ORGANIC CHEMISTRY   (China)

Author keywords

Electrical properties and measurements; Iron; Plasma processing and deposition; Structural properties

Indexed keywords

AMORPHOUS FILMS; AUGER ELECTRON SPECTROSCOPY; COMPOSITE MATERIALS; CRYSTAL MICROSTRUCTURE; ELECTRIC PROPERTIES; IRON COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; METALLORGANIC POLYMERS; OPTICAL PROPERTIES; PLASMA APPLICATIONS; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

FILLING FACTOR; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

PLASTIC FILMS;

EID: 0031188639     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00085-0     Document Type: Article

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