Efficient optimization of transient dynamic problems in MEMS devices using model order reduction

Journal of Micromechanics and Microengineering

Volumn 15, Issue 4, 2005, Pages 822-832

  Han, Jeong Sam ^a   Rudnyi, Evgenii B ^b   Korvink, Jan G ^b  

^a Andong National University   (South Korea)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; OPTIMIZATION; PROBLEM SOLVING;

FINITE ELEMENT MODELS; MICRO ACCELEROMETER; TIME-DEPENDENT RESPONSE SIMULATION; TRANSIENT DYNAMICS;

MICROELECTROMECHANICAL DEVICES;

EID: 17444403585     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/021     Document Type: Article

References (22)

1. Rudnyi E B and Korvink J G 2002 Automatic model reduction for transient simulation of MEMS-based devices Sensors Update 11 3-33
2. Bai Z J 2002 Krylov subspace techniques for reduced-order modeling of large-scale dynamical systems Appl. Numer. Math. 43 9-44
3. Freund R W 2000 Krylov-subspace methods for reduced-order modeling in circuit simulation J. Comput. Appl. Math. 123 395-421
4. Yang Y J and Yu C C 2004 Extraction of heat-transfer macromodels for MEMS devices J. Micromech. Microeng. 14 587-96
5. Bechtold T, Rudnyi E B and Korvink J G 2003 Automatic generation of compact electro-thermal models for semiconductor devices IEICE Trans. Electron. 86 459-65
6. Bechtold T, Hildenbrand J, Wöllenstem J and Korvink J G 2004 Model order reduction of 3D electro-thermal model for a novel micromachined hotplate gas sensor Proc. 5th Int. Conf. on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems (EUROSIME2004) (Brussels, Belgium, 9-12 May) pp 263-7
7. Lienemann J, Billger D, Rudnyi E B, Greiner A and Korvink J G 2004 MEMS compact modeling meets model order reduction: examples of the application of Arnoldi methods to microsystem dvices NSTI Nanotechnology Conference and Trade Show (Boston, MA, 7-11 March, 2004) vol 2 pp 303-6
8. Reitz S, Bastian J, Haase J, Schneider P and Schwarz P 2003 System level modeling of microsystems using order reduction methods Analog Integr. Circuits Signal Process. 37 7-16
9. Su T J and Craig R R Jr 1991 Model reduction and control of flexible structures using Krylov vectors J. Guid. Control Dyn. 14 260-7
10. Odabasioglu A, Celik M and Pileggi L T 1998 PRIMA: passive reduced-order interconnect macromodeling algorithm IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst. 17 645-54
11. Bai Z J, Bindel D, Clark J, Demmel J, Pister K and Zhou N 2001 New numerical techniques and tools in SUGAR for 3D MEMS simulation Technical Proc. 2001 Int. Conf. on Modeling and Simulation of Microsystems (Hilton Head Island, SC, 19-21 March) vol 1 pp 31-4
12. Ostergaard D and Gyimesi M 2000 Finite element based reduced order modeling of microelectromechanical systems (MEMS) Technical Proc. 2000 Int. Conf. on Modeling and Simulation of Microsystems (MSM 2000) (San Diego, CA, 27-29 March) pp 684-7
13. Rudnyi E B, Lienemann J, Greiner A and Korvink J G 2004 mor4ansys: Generating compact models directly from ANSYS models 2004 NSTI Nanotechnology Conference and Trade Show (Boston, MA, 7-11 March, 2004) vol 2 pp 279-82
14. ANSYS 2003 ANSYS Theory Reference 7.1 (Canonsburg, PA: ANSYS Inc)
15. Guyan R J 1965 Reduction of stiffness and mass matrices AIAA J. 3 380
16. Su T J and Craig R R Jr 1991 Krylov model reduction algorithm for undamped structural dynamics systems J. Guid. Control Dyn. 14 1311-3
17. Rudnyi E B and Korvink J G 2004 Model order reduction for large scale engineering models developed in ANSYS PARA'04, Workshop on State-of-the-Art in Scientific Computing (Technical University of Denmark, 20-23 June)
18. Wolfram S 2003 The Mathematica Book 5th edn (Champaign, IL: Wolfram Media)
19. DOT 1995 DOT Users Manual version 4.20 (Colorado Springs, CO: Vanderplaats Research and Development)
20. Ko J S, Cho Y H, Kwak B M and Park K 1998 Design and fabrication of piezoresistive cantilever microaccelerometer arrays with a symmetrically bonded proof-mass IMECE '98, ASME (Anaheim, CA) pp 353-6
21. Han J S and Kwak B M 2004 Robust optimization using a gradient index: MEMS applications Struct. Multidisc. Optim. 27 469-78
22. Bechtold T, Rudnyi E B and Korvink J G 2005 Error indicators for fully automatic extraction of heat-transfer macromodels for MEMS J. Micromech. Microeng. 15 430-40