Interface quality control of monolithic photonic crystals by hydrogen annealing

2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

Volumn , Issue , 2008, Pages

  Kim, Sora ^a   Kant, Rishi ^a   Hadzialic, Sanja ^b,c   Howe, Roger T ^a   Solgaard, Olav ^a  

^a Stanford University   (United States)

^b UNIVERSITY OF OSLO   (Norway)

^c UNIVERSITY OF OSLO   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRO-OPTICS; HYDROGEN ANNEALING; LASER SCIENCE;

ANNEALING; CRYSTAL ATOMIC STRUCTURE; CRYSTALLOGRAPHY; CRYSTALS; CUSTOMER SATISFACTION; ELECTRON OPTICS; HYDROGEN; LASERS; PHOTONICS; POWDERS; QUALITY ASSURANCE; QUALITY FUNCTION DEPLOYMENT; QUANTUM ELECTRONICS; SILICON; SURFACE ROUGHNESS; TOTAL QUALITY MANAGEMENT;

PHOTONIC CRYSTALS;

EID: 51349155242     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CLEO.2008.4551093     Document Type: Conference Paper

References (4)

1. W. W. Mullins, "Theory of thermal grooving", Journal of Applied Physics, vol. 28, no. 3, pp. 333-339, 1957
2. M.C.M. Lee, and M.C. Wu, "Thermal annealing in hydrogen for 3-D profile transformation on silicon-on-insulator and sidewall roughness reduction", Journal of Microelectromechanical Systems, vol 15, no. 2, pp.338-343, April 2006
3. D.K. Armani, T.J. Kippenberg, S.M. Spillane, and K.J. Vahala, "Ultra-high-Q toroid microcavity on a chip", Nature, vol. 421, no. 6926, pp. 925-928, Feb. 2003.
4. S. Hadzialic, S. Kim, S. Basu Mallick, A. Sudbo, and O. Solgaard, "Monolithic Photonic Crystals", 2007 IEEE/LEOS Annual Meeting Conference Proceedings, Lake Buena Vista, Florida, 21-25 October 2007, pp. 341-342