Impact of high optical power on optical MEMS

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Volumn , Issue , 2008, Pages 68-69

  Spahn, Olga Blum ^a   Phinney, Leslie M ^a   Wong, C Channy ^a   Cowan, William D ^a   Adams, David P ^a   Grossetete, Grant D ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b L and M Technologies   (United States)

Author keywords

Deformation; MEMS mirrors; Optical power handling

Indexed keywords

MEMS MIRRORS; MITIGATION STRATEGIES; OPTICAL MEMS; OPTICAL POWER HANDLING; OPTICAL POWERS; PERFORMANCE LIMITATIONS;

COMPOSITE MICROMECHANICS; MICROELECTROMECHANICAL DEVICES; MIRRORS; PHOTONICS;

MEMS;

EID: 54049119313     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2008.4607832     Document Type: Conference Paper

References (4)

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3. Gall K., West N., Spark K., Dunn M. L., Finch D. S., "Creep of thin film Au on bimaterial Au/Si microcantilevers", Acta Materialia vol. 52, pp. 2133-2146, 2004
4. Phinney, L.M., Spahn, O.B., Wong, C.C., "Experimental and computational study on laser heating of surface micromachined cantilevers", Proceedings of SPIE v. 6111, pp. 11108-11108, 2006