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Volumn , Issue , 2006, Pages 91-96
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Standard MEMS sensor technologies for harsh environment
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Colibrys
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Author keywords
[No Author keywords available]
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Indexed keywords
ASSEMBLY TECHNIQUES;
COLD TEMPERATURES;
ENVIRONMENTAL CONSTRAINTS;
HARSH ENVIRONMENTS;
MEMS SENSORS;
MICROMACHINING TECHNIQUES;
NEW APPLICATIONS;
OIL AND GAS;
PARALLEL MANUFACTURING;
POWER CONSUMPTION;
PRECISE MEASUREMENTS;
ROBUST SENSORS;
ACCELEROMETERS;
ACTUATORS;
APPLICATIONS;
ELECTRIC POWER UTILIZATION;
LATTICE VIBRATIONS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROSENSORS;
SENSORS;
SILICON;
SILICON CARBIDE;
STANDARDS;
TECHNOLOGY;
TECHNOLOGY TRANSFER;
VIBRATIONS (MECHANICAL);
COMPOSITE MICROMECHANICS;
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EID: 51949093605
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (9)
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References (0)
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