Poly(Dimethylsiloxane) waveguide cantilevers for optomechanical sensing

IEEE Photonics Technology Letters

Volumn 21, Issue 2, 2009, Pages 79-81

  Llobera, A ^a,b   Cadarso, V J ^b   Zinoviev, K ^b   Dominguez C ^b   Buttgenbach S ^b   Vila, J ^b   Plaza, J A ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b CSIC   (Spain)

Author keywords

Microoptoelectromechanical systems (MOEMS); Microsensors; Optical polymers; Plastics; Waveguides

Indexed keywords

INITIAL VALUES; LOW YOUNG'S MODULUS; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS); MONOLITHIC INTEGRATION; NANO-METER SCALE; NUMERICAL SIMULATION; OPTICAL POLYMERS; OPTOMECHANICAL; POLYDIMETHYLSILOXANE PDMS; RESONANT FREQUENCIES; SOFT LITHOGRAPHY;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DROP FORMATION; ELASTOMERS; ETHANOL; LIGHT EMITTING DIODES; MICROCHANNELS; MICROSENSORS; MONOLITHIC INTEGRATED CIRCUITS; NANOCANTILEVERS; NATURAL FREQUENCIES; OPTICAL PROPERTIES; PLASTICITY; POLYMERS; WAVEGUIDES;

MOEMS;

EID: 70350196835     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2008.2008659     Document Type: Article

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