Two step reactive magnetron sputtering of BLT thin films

Integrated Ferroelectrics

Volumn 94, Issue 1, 2007, Pages 94-104

  Besland, M P ^a   Bordcron, C ^b   Cavellier, M ^a   Le Tacon, S ^b   Richard Plouet, M ^a   Albertini, D ^c   Averty, D ^b   Tessicr, P Y ^a   Gundcl, H W ^b   Brohan, L ^a   Djouadi, M A ^a  

^a INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

^b UNIVERSITY OF NANTES   (France)

^c INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 70349994076     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580701756300     Document Type: Conference Paper

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