Comparison of lanthanum substituted bismuth titanate (BLT) thin films deposited by sputtering and pulsed laser deposition

Thin Solid Films

Volumn 495, Issue 1-2, 2006, Pages 86-91

  Besland, M P ^a   Djani Ait Aissa, H ^b   Barroy, P R J ^a   Lafane, S ^b   Tessier, P Y ^a   Angleraud, B ^a   Richard Plouet, M ^a   Brohan, L ^a   Djouadi, M A ^a  

^a UNIVERSITÉ DE NANTES   (France)

^b CENTRE DE DÉVELOPPEMENT DES TECHNOLOGIES AVANCÉES   (Algeria)

Author keywords

Aurivillius phase; BLT oxide; PLD; PVD magnetron; Thin films deposition

Indexed keywords

BISMUTH COMPOUNDS; ELLIPSOMETRY; FILM GROWTH; MAGNETRON SPUTTERING; MIXTURES; PULSED LASER DEPOSITION; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; TITANATE MINERALS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

AURIVILLIUS PHASE; BLT OXIDE; PVD MAGNETRON; THIN FILMS DEPOSITION;

THIN FILMS;

EID: 28044458990     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.154     Document Type: Conference Paper

References (18)

1. E.W. Kreutz, and J. Gottmann J. Eur. Ceram. Soc. 24 2004 979
2. C. Paz de Araujo, J.F. Scott, and G.W. Taylor Ferroelectric Thin Films: Synthesis and Basic Properties 1996 Ed.Gordon and Breach Amsterdam
3. M. Daglish, and T. Kemmitt IPENZ Transactions 27 2000 21
4. O. Auciello, J.F. Scott, and R. Ramesh Phys. Today 1998 22
5. R. Ramesh, S. Aggarwal, and O. Auciello Mat. Sci. Eng. 32 2001 191
6. M.W. Chu, M. Ganne, M.T. Caldes, and L. Brohan J. Appl. Phys. 91 2002 3178
7. B.H. Park Nature 401 1999 682
8. Q. Wang, and M. Shen Thin Solid Films 473 2005 74
9. S. Kang, and S. Rhee J. Vac. Sci. Technol., A 21 1 2003 340
10. H.N. Lee, D. Hesse, N. Zakharov, S.K. Lee, and U. Gösele J. Appl. Phys. 93 2003 5592
11. M.W. Chu, S.K. Lee, D. Hesse, and U. Gösele Appl. Phys. Lett. 85 2005 2029
12. C. Schwan, P. Haibach, G. Jakob, J.C. Martinez, and H. Adrian J. Appl. Phys. 86 1999 960
13. C.-L. Huang, and C.-H. Hsu J. Appl. Phys. 96 2004 1186
14. A.P. Huang, and P.K. Chu J. Appl. Phys. 97 2005 114106
15. D. Brassard, D.K. Sarkar, and M.A. El Khakani J. Vac. Sci. Technol., A 22 3 2004 851
16. C. Vallée, A. Goullet, and A. Granier Thin Solid Films 311 1997 212
17. G.E. Jellison, and F.A. Modine Appl. Phys. Lett. 63 1996 371
18. Z. Hu, G. Wang, Z. Huang, and J. Chu J. Appl. Phys. 93 2003 3811